Grazing incidence X-ray reflectivity - a Round Robin test : Report of the International Commission on Glass (ICG) Technical Committee 19 "Glass Surface Diagnostics"

Abstract

Densities and thicknesses of films of five different layer systems were determined in a grazing incidence X-ray analysis (GIXA) Round Robin test carried out by three industrial laboratories. The influence of both the experimental setup and the simulation software on these results is compared for the identical set of samples. Two approaches are adopted; firstly each laboratory measuring and simulating its own data and secondly each laboratory simulating the data that had been measured by another laboratory. The measured data from the three laboratories are analyzed and reasons proposed to explain the relatively minor differences between them. Comparisons are also made between the simulations produced from the two approaches to determine variations and any systematic bias between the three laboratories. Overall, good agreement in film densities and film thicknesses is found, demonstrating the high levels of accuracy that can be obtained from coating analysis using the GIXA technique