Offenbach : Verlag der Deutschen Glastechnischen Gesellschaft
Doi
Abstract
Some representative characteristics of oxide coatings deposited on glass by different techniques have been described as well as several relevant methods of thin film analysis to determine their properties. Various special requirements of thin film analysis of oxide layers have briefly been outlined and the problem-solving process has been indicated. The potential of the problem-oriented use of the methods of thin film analysis has been demonstrated on the film properties composition, stress and density. The film density, which is determined by the deposition methods and production parameters, seems to be a key quantity which determines various other corresponding film properties
