An automated method, requiring the fabrication of a small set of test structures, efficiently extracts the coefficients of Z-parameter based macromodels. The extraction approach has been validated for both heavily and lightly doped substrates and can be applied to a variety of technologies. After the parameters of a macromodel have been extracted, the model can be used to quickly and accurately calculate the equivalent substrate network connecting an arbitrary number of contacts. This automated extraction process has been integrated into the Cadence DFII environment to provide a seamless flow for substrate noise analysis.Keywords: coupling, model, substrate, nois
