The electrode size dependence of the effective large signal piezoelectric response coefficient (d(33,f)) of lead zirconate titanate (PZT) thin films is investigated by using double beam laser interferometer measurements and finite element modeling. The experimentally observed electrode size dependence is shown to arise from a contribution from the substrate. The intrinsic PZT contribution to d(33,f) is independent of electrode size and is equal to the theoretical value derived assuming a rigid substrate. The substrate contribution is strongly dependent on the relative size of the electrode with respect to the substrate thickness. For electrode sizes larger than the substrate thickness, the substrate contribution is positive and for electrode sizes smaller than the substrate thickness, the substrate contribution is negative. In the case of silicon substrates, if the electrode size is equal to the substrate thickness, the substrate contribution vanishes, and the measured value of d(33,f) is equal to the theoretical value under the rigid substrate assumption. (C) 2013 AIP Publishing LLC.This is the publisher’s final pdf. The published article is copyrighted by AIP Publishing LLC and can be found at: http://www.aip.org/. Copyright Statement Basic Permissions Limited license IS GRANTED to individuals accessing this document and its component documents and/or files for the following personal, noncommercial uses: 1. Retrieving or printing a copy of any document or file mounted on this server 2. Establishing a link or links to any document or file mounted on this server Individuals accessing this document and its component documents and/or files are NOT GRANTED license to: 1. Alter a copy of any retrieved or printed document or file from this server 2. Distribute a copy (electronic or otherwise) of any document or file from this server without permission from the American Institute of Physics (direct requests to [email protected] 3. Charge for a copy (electronic or otherwise) of any document or file from this server. This server and its contents, unless otherwise indicated, are the property of the American Institute of Physics
