Silicon Carbide MOSFETs are shown in research to outperform Silicon counterparts on many performance metrics, including switching rates and power losses. To further improve their performance, trench and double-trench structures have recently been developed. To replace conventional planar SiC MOSFETs, besides the performance parameters which are mostly stated in datasheets, reliability studies under stress are also needed. This thesis presents a comprehensive comparison between 3rd generation trench SiC power MOSFETs, namely symmetrical double-trench and asymmetrical trench with planar SiC power MOSFETs on four aspects of: switching slew rates (dI/dt & dV/dt), crosstalk characteristics, bias temperature instability and power cycling stability.First, the dynamic performance in both 1st quadrant and 3rd quadrant has been eval- uated on the differences in stress by dI/dt & dV/dt and resultant losses. This is key in understanding many other reliability criterions, i.e. severity of crosstalk induced switchings. In the 1st quadrant, the source current and drain-source voltage switching rates at both turn-ON and turn-OFF are measured under a range of test conditions. Both the symmetrical and asymmetrical trench MOSFETs have up to 2 times faster voltage and current slew rates compared with the planar one. They also indicate only slight changes in switching rate with junction temperature. In the 3rd quadrant, the reverse recovery peak current and total reverse recovery charge are measured with respect to junction temper- ature and load current level. Both the symmetrical and asymmetrical trench MOSFETs have less than half of the reverse recovery charge of that of the planar SiC MOSFET.In the evaluation of crosstalk characteristics, peak shoot-through current and induced gate voltage at crosstalk are measured with respect to junction temperature and external gate resistance. With particularly large external gate resistances connected to intentionally induce parasitic turn-ON, the symmetrical double-trench MOSFET is shown to be more prone to crosstalk with 23 A peak shoot-through current measured while it is only 10 A for asymmetrical trench and 4 A for planar MOSFET under similar test conditions. As the temperature increase, the peak shoot-through current drops for the symmetrical double-trench, while constant for the asymmetrical trench and rising for the planar device.Threshold voltage drift is also measured to reflect the degradation happened with bias temperature instability at various junction temperatures, stressing voltages and time periods. Under low-magnitude gate stress (within the range of datasheets) in both positive and negative bias cases, there is more threshold drift observed on the two trench MOSFETs at all junction temperatures than the planar MOSFET. When the stress magnitude is raised, there is less threshold drift observed on the two trench MOSFETs.To evaluate the ruggedness in continuous switchings, the devices are placed under repetitive turn-ON events. The thermal performance under such operation are compared. The asymmetrical trench MOSFET experiences the highest case temperature rise while the least is observed for the planar MOSFET. With an external heatsink equipped to achieve more efficient cooling, the repetitive turn-ON test transforms into the conventional power cycling. In this condition, both the symmetrical and asymmetrical trench MOSFETs fail earlier than the degraded (but not failed) planar MOSFET
