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(oral talk) Controlling charge polarity and defect density at Ge/Al2O3 interface using SiNx interlayer
Authors
Tsun Hang Fung
Joonas Isometsä
+5 more
Oskari Leiviskä
Hanchen Liu
Toni Pasanen
Hele Savin
Ville Vähänissi
Publication date
1 January 2022
Publisher
Abstract
| openaire: EC/H2020/777222/EU//ATTRACTPeer reviewe
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Last time updated on 08/12/2023