Novel miniature-scale bistable actuators are developed, which consist of two antagonistically coupled buckling shape memory alloy (SMA) beams. Two SMA films are designed as buckling SMA beams, whose memory shapes are adjusted to have opposing buckling states. Coupling the SMA beams in their center leads to a compact bistable actuator, which exhibits a bi-directional snap-through motion by selectively heating the SMA beams. Fabrication involves magnetron sputtering of SMA films, subsequent micromachining by lithography, and systems integration. The stationary force–displacement characteristics of monostable actuators consisting of single buckling SMA beams and bistable actuators are characterized with respect to their geometrical parameters. The dynamic performance of bistable actuation is investigated by selectively heating the SMA beams via direct mechanical contact to a low-temperature heat source in the range of 130–190 °C. The bistable actuation is characterized by a large stroke up to 3.65 mm corresponding to more than 30% of the SMA beam length. Operation frequencies are in the order of 1 Hz depending on geometrical parameters and heat source temperature. The bistable actuation at low-temperature differences provides a route for waste heat recovery
