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Optical characterization of the impact of 100 keV protons on the optical properties of ZrO2 films prepared by ALD on fused silica substrates
Authors
E. Burresi
T. Dunatov
+10 more
H. He
P. Olivero
M. Palmisano
E. Pesce
M. L. Protopapa
Z. Siketić
A. Sytchkova
L. Tapfer
Y. Wang
Z. Wang
Publication date
1 January 2023
Publisher
Doi
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Abstract
Abstract is not available.
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Institutional Research Information System University of Turin
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oai:iris.unito.it:2318/1890576
Last time updated on 02/03/2023
