CORE
🇺🇦
make metadata, not war
Services
Research
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Impact of Al2O3 ALD growth and properties on passivation quality of p‐polySi/Al2O3 stacks
Authors
Wolfhard Beyer
W.M.M. Kessels
+5 more
Jimmy Melskens
Agnes Mewe
Mark Steltenpool
R.J. Theeuwes
Arthur W. Weeber
Publication date
1 January 2022
Publisher
Abstract
Abstract is not available.
Similar works
Full text
Available Versions
Pure OAI Repository
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:pure.tue.nl:publications/c...
Last time updated on 11/08/2023
