Impact of amplifier errors on position loop accuracy of high precision moving stages

Abstract

A generic approach to model the position control of an electromechanical system is described that includes several potential error mechanisms originating from the power amplifier, independent of the actual amplifier implementation. The simplified outline of a mechatronic system is given to which models of the power amplifier are added in order to emulate the error mechanisms. Analysis of the impact of each error mechanism on the position accuracy of the mechatronic system is given from which boundary specifications for the power amplifier can be obtained for a certain required position accuracy