Low noise far-infrared detection at 90 K using high-T(c) superconducting bolometers with silicon-nitride beam suspension

Abstract

High-T(c) GdBa2Cu3O7-d (GBCO) superconducting transition edge bolometers with operating temperatures near 90 K and receiving area of 1 mm2 have been made with both closed silicon-nitride membranes and patterned silicon-nitride (Si(x)N(y)) spiderweb-like suspension structures. To enable epitaxial growth of the GBCO layer, a thin monocrystalline Si layer is prepared on the silicon-nitride base, using fusion bonding techniques. By pattering the silicon-nitride supporting membrane the thermal conductance G is reduced from 20 to 3.5 μW/K. The noise of both types of bolometers is fully dominated by the intrinsic noise from phonon fluctuations in the thermal conductance G. The optical efficiency in the far infrared is about 75% due to a gold black absorption layer. The optical noise equivalent power (NEP) is 1.8 pW/√Hz, and the detectivity D* is 5.4x1010 cm√Hz/W. Time constants are 0.1 and 0.6 s, for the closed membrane and the spiderweb like bolometers respectively. We have observed an empirical limit for the NEP for this type of bolometers. The effective timeconstant can be reduced with a factor of 3 by using an electronic feedback system or by using voltage bias. A further reduction necessarily results in an increase of the NEP due to the 1/f noise of the superconductor