Grushin, A.S.

Ivanov, V.

Koshelev, K.

Krivtsun, V.M.

Medvedev, Viacheslav

Novikov, D.

English

University of Twente Research Information

2012 International Workshop on EUV and Soft X-Ray Sources  www.euvlitho.com                                                                                                                             78 S54  Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses  V. Ivanov1, A. Grushin2, V. Novikov2, V. Medvedev3, V. Krivtsun1, A. Yakunin4, and K. Koshelev1  1Institute for Spectroscopy RAS, Troitsk, Russia 2Keldysh Institute of Applied Mathematics, Moscow, Russia 3Dutch Institute for Fundamental Energy Research, Nieuwegein, The Netherlands 4ASML, The Netherlands    Generation efficiency of EUV radiation by laser-produced plasma (LPP) sources is defined by the effective coupling of the laser radiation to Sn target. Expected that usage of the distributed targets (DT) consisting of a number of small (from one to few micrometers) droplets distributed over the volume with a total size of a few hundred micrometers allows noticeably increase laser radiation absorption and in-band conversion efficiency.   To simulate optical, atomic and hydrodynamic processes in LPP sources based on DT approach, an integrated model is being developed. The hydrodynamic plasma model includes diffusion-like radiation transport with 100 and more groups of spectral groups with well represented in-band EUV. Non-stationary ionization (recombination) processes are also included. Energy fluxes to and from a target surface are taken into account: electron and ion thermo-conductivity, radiative transfer in every spectral group, condensation and recombination of vapor and plasma. Verified atomic data are used for calculation opacity and emissivity. Results of a numerical simulation are presented for various types of DT.   Presenting Author      

Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

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Modeling of Plasma Dynamics and EUV Generation for Distributed Sn Targets Irradiated with Short Laser Pulses

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