This paper presents results of the first phase of “Dielectric Elastomer Cooperative Microactuator Systems” (DECMAS), a project within the German Research Foundation Priority Program 2206, “Cooperative Multistable Multistage Microactuator Systems” (KOMMMA). The goal is
the development of a soft cooperative microactuator system combining high flexibility with largestroke/high-frequency actuation and self-sensing capabilities. The softness is due to a completely
polymer-based approach using dielectric elastomer membrane structures and a specific silicone bias
system designed to achieve large strokes. The approach thus avoids fluidic or pneumatic components, enabling, e.g., future smart textile applications with cooperative sensing, haptics, and even
acoustic features. The paper introduces design concepts and a first soft, single-actuator demonstrator
along with experimental characterization, before expanding it to a 3 × 1 system. This system is
used to experimentally study coupling effects, supported by finite element and lumped parameter
simulations, which represent the basis for future cooperative control methods. Finally, the paper
also introduces a new methodology to fabricate metal-based electrodes of sub-micrometer thickness
with high membrane-straining capability and extremely low resistance. These electrodes will enable
further miniaturization towards future microscale applications
