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Growth Modes of Sioₓ Films Deposited by Evaporation and Plasma-Enhanced Chemical Vapor Deposition on Polymeric Substrates
Authors
G. Dennler
A. Houdayer
+4 more
P. Raynaud
Y. Segui
I. Seguy
Michael R. Wertheimer
Publication date
1 January 2003
Publisher
Kluwer Academic Publishers
Doi
Abstract
Abstract is not available.
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Last time updated on 28/08/2023
