Nanotechnology and nanomaterials have attracted considerable interest and are predicted to revolutionize many materials and technologies that we use in everyday life. In the past few years, significant research has focused on one dimensional metal oxide nanostructures due to their unique properties and potential applications in various fields from nanoelectronics to energy. However, controlled synthesis of these nanostructures is still a challenge. The objective of this thesis is to synthesize metal oxide nanowires by chemical vapour deposition directly on various substrates. The nanostructures include (i) silicon oxide nanostructures on silicon substrate, (ii) manganese oxide nanostructures on silicon substrate, and (iii) manganese oxide nanostructures on carbon paper substrate. Firstly, silicon oxide nanowires were synthesized on silicon substrate by a VO2 assisted chemical vapor deposition. Networked features of silicon oxide nanowires were found. Systematic study on the nanowire growth has indicated that morphology and composition of the final products are considerably sensitive to the catalyst components, reaction atmosphere and temperature. These results will help in better understanding the growth process of silicon oxide nanowires. Secondly, manganese oxide nanostructures were synthesized on silicon substrate by chemical vapor deposition method. It was found that MnO nanowires are high density and single crystalline with average diameter of 150 nm. These nanowires were characterized using FESEM, EDX, TEM and XRD. The synthesis process and effects of growth parameters such as temperature, heating rate and source/substrate distance on the morphology, composition and structure of the products were systematically studied. Finally, manganese oxide nanostructures were synthesized on carbon paper substrate by chemical vapor deposition method. It was revealed that manganese oxide nanowires and nanobelts can be selectively grown on carbon paper substrate by using a catalyst (gold) assisted or catalyst free thermal evaporation of manganese powder under an argon gas atmosphere. Various effects of growth parameters such as temperature, catalyst and buffered substrate on the growth product were also systematically investigated by using SEM, TEM and XPS