In this work, we investigate changes in the phase composition, morphology, and structural changes during the photonic treatment of films obtained in the process of ion-beam sputtering of an Nb2O5 target. It was found that the initial films have an amorphous structure; at an irradiation energy of ~ 1.Работа была выполнена при поддержке государственного задания (N FZGM-2020-0007)
