Single photon emission from waveguide-integrated color centers in silicon

Abstract

We demonstrate silicon color centers coupled to foundry-compatible silicon waveguides. We produced G-centers via carbon implantation in commercial silicon-on-insulator waveguides and measure through-waveguide single-photon emission in the telecommunications O-band.Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.QID/Hanson La