Silicon Based Suspended Thermometry Device Fabrication for Phonon Ballistic and Coherent Regimes Study

Abstract

International audienceThis works addresses the current experimental gap in thermal transport regimes and phonon transport at low temperatures and small scales. We have fabricated a (SOI based) suspended thermal sensor platform functional from room-T down to 20 mK. The device will be used for the study phonon transport across several Si-based samples like phononic crystals, metamaterials and nanowires