Experimental studies of the processes occuring in ion plating discharges
- Publication date
- Publisher
Abstract
A theoretical study of the processes occurring in ion plating is carried out and the potential of various mechanisms affecting properties of ion-plated films is studied. Three pieces of apparatus are designed and developed to study the contributions of the mechanisms responsible for the properties of ionplated films.A thorough experimental investigation of the processes occurring in ion plating discharges is carried out