A study of real-time spindle error compensation in single-point diamond turning of optical micro-structured patterns on precision rollers

Abstract

Micro-structured patterns are widely used in optics since the optical performance can be significantly improved in many applications [1]. One of the most common methods to fabricate the micro-structure is using Single-Point Diamond Turning on Precision Rollers [2]. The accuracy requirement of the Precision Rollers is stringent because the dimension of the microstructure is very small (pitch lengths and depths 10-100μm) and surface finishing is ultra-smooth (Ra<3nm) [2]. In order to achieve this level of accuracy, the manufacturing errors of the machine tool are required to be reduced while error compensation methods are needed to be developed. Spindle errors can be classified as synchronous error and asynchronous error [3]. Synchronous error occurs at integer times of spindle rotation frequency and can be represented as repeatable error while asynchronous error occurs at noninteger times of spindle rotation frequency and can be represented as non-repeatable error. Most of the existing error compensation techniques are based on offline error compensation methods (OECM) which can only compensate the synchronous error [4,5]. The asynchronous error is fluctuating without a predictable value and it is different from the synchronous error so it cannot be eliminated using OECM. One of the most promising methods to compensate the asynchronous error is real-time error compensation method (RECM). Some researchers have studied the RECM and their results showed that it was effective to enhance the machine accuracy [6,7]. However, most of the previous research work is focused on the machine tools with a relatively low accuracy and there is relatively few studies focused on the Single-Point Diamond Turning. Kim and Kim developed a feed-forward control of fast tool servo system for real-time correction of spindle error for diamond turning of flat surfaces [8]. A capacitive displacement sensor was used to measurement the spindle axial error motion and the motion error was compensated using a fast tool servo. A flatness of 0.1μm was achieved with a 100mm diameter aluminum specimen. However, the study only considered the axial error, when it is diamond turned on precision rollers, both the radial error and axial error have to be compensated. This paper attempts to investigate the RECM in Single-Point Diamond Turning of Optical Microstructured Patterns on Precision Rollers. The radial error and axial error were simulated and the compensated results of OECM and RECM were presented considering both synchronous errors and asynchronous errors in radial and axial directions. The results of OECM and RECM were also compared and discussed. Furthermore, the effects of time delay in RECM were studied. An adaptive time-series modeling method was also proposed to predict the realtime error to reduce the time delay effect of RECM. The results show that the RECM is effective and promising to further improve the accuracy of the Single-Point Diamond Turning Precision Rollers

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