Image charge detection is a non-perturbative pre-detection approach for deterministic ion
implantation. Using low energy ion bunches as a model system for highly charged single ions,
we experimentally studied the error and detection rates of an image charge detector setup. The
probability density functions of the signal amplitudes in the Fourier spectrum can be modelled
with a generalised gamma distribution to predict error and detection rates. It is shown that the
false positive error rate can be minimised at the cost of detection rate, but this does not impair
the fidelity of a deterministic implantation process. Independent of the ion species, at a signal to-noise ratio of 2, a false positive error rate of 0.1% is achieved, while the detection rate is
about 22
