Wafer-scale fabrication of 2D nanostructures via thermomechanical nanomolding

Abstract

With shrinking dimensions in integrated circuits, sensors, and functional devices, there is a pressing need to develop nanofabrication techniques with simultaneous control of morphology, microstructure, and material composition over wafer length scales. Current techniques are largely unable to meet all these conditions, suffering from poor control of morphology and defect structure or requiring extensive optimization or post-processing to achieve desired nanostructures. Recently, thermomechanical nanomolding (TMNM) has been shown to yield single-crystalline, high aspect ratio nanowires of metals, alloys, and intermetallics over wafer-scale distances. Here, we extend TMNM for wafer-scale fabrication of 2D nanostructures. Using Cu, we successfully nanomold Cu nanoribbons with widths < 50 nm, depths ~ 0.5-1 microns and lengths ~ 7 mm into Si trenches at conditions compatible with back end of line processing. Through SEM cross-section imaging and 4D-STEM grain orientation maps, we show that the grain size of the bulk feedstock is transferred to the nanomolded structures up to and including single crystal Cu. Based on the retained microstructures of molded 2D Cu, we discuss the deformation mechanism during molding for 2D TMNM.Comment: 4 figure