Spray pyrolysis has been used to prepare La0.6 Sr0.4Co0.2Fe0.8O3-δ thin film cathodes for solid oxide fuel cell (SOFC) applications. The films are polycrystalline with nano-meter sized grains and less than 1 μm in thickness. Deposition parameters for film deposition have been established. The ratio of deposition temperature to solvent boiling point is found to be the most important processing parameter that determines whether a crack free homogeneous and coherent film is obtained. The morphology can be tailored by the deposition parameters. Annealing at 650∘C for four hours in air results in coherent films of the desired perovskite phase. The films are potential cathodes for thin film micro-solid oxide fuel cell
