The influence of nanoscale topography and chemical composition on microfriction has been studied at different humidities. Structured surfaces exhibit lower friction than smooth ones. Among the structured surfaces, the crater-like morphologies show lower friction than pyramid-like morphologies. No significant differences in friction were observed when varying the roughness of the crater-like structures. On pyramid-like morphologies, friction increases with decreasing roughness. Additional hydrophobization of surface nanostructures results in only small reductions in frictio
