Color centers in wide band-gap semiconductors, which have superior quantum
properties even at room temperature and atmospheric pressure, have been
actively applied to quantum sensing devices. Characterization of the quantum
properties of the color centers in the semiconductor materials and ensuring
that these properties are uniform over a wide area are key issues for
developing quantum sensing devices based on color center. In this article, we
will describe the principle and performance of a newly developed confocal
microscope system with a long Rayleigh length (LRCFM). This system can
characterize a wider area faster than the confocal microscope systems commonly
used for color center evaluation