マイクロ波放電による高密度プラズマの生成
- Authors
- Satoh Akihiko
- Faculty of Engineering,HimejiInstitute of Technology Department of Electronic Engineering
- Faculty of Engineering,HimejiInstitute of Technology Department of Electronic Engineering
- Department of Electronic Engineering,Faculty of Engineering,Himeji Institute of Technology
- Department of Electronic Engineering,Faculty of Engineering,Himeji Institute of Technology
- Hamada Morifumi
- Kaneko Takenori
- Ohguchi Yasutomo
- 昌彦 佐藤
- 保友 大口
- 姫路工業大学工学部電子工学教室
- 姫路工業大学工学部電子工学教室
- 姫路工業大学工学部電子工学科
- 姫路工業大学工学部電子工学科
- 森文 浜田
- 壮至 金児
- Publication date
- 23 May 2017
- Publisher