Inductively coupled UV lamps require a high-frequency alternating current for ignition and efficient operation. In this work, we present a switch-mode half-bridge inverter, with SiC-MOSFETs, which achieves a conversion efficiency from the DC-Link to a 2.5 MHz alternating current of 95% at 750W lamp power, including auxiliary power for the gate drivers and the controller. Furthermore, the paper describes an algorithm for the active power measurement of a 2.5 MHz voltage and current signal with an oscilloscope, averaging in the frequency domain and spectral distinction of the active power at the switching frequency
