The micro-electromechanical-system (MEMS) force and acceleration sensor
utilizing the graphene-induced non-radiative transition was investigated. The
graphene-induced non-radiative transition is very sensitive to the distance,
and the deflection of the graphene ribbon is highly susceptive to applied force
or acceleration. Thus, a high-sensitivity MEMS sensor can be achieved with
detecting the graphene ribbon's deflection of 1 nm, the force of 0.1 pN, and
the acceleration of 0.1 mg. The MEMS sensor, with a size of only tens of
microns, can be charged by light irradiation without connecting power sources.
In addition, it allows long-distance detection, i.e., wireless transmitter
circuit can be omitted. Therefore, it will have significant application
prospects in the fields of micro-smart devices, wearable devices, biomedical
systems, and so on.Comment: 21 pages, 4 figure