Method for making a 3d nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method

Abstract

The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure