Using a two step plasma etching process for diamond power devices

Authors
Publication date
1 January 2012
Publisher
HAL CCSD

Abstract

International audienc

    Similar works

    Full text

    thumbnail-image

    Available Versions

    HAL-INSA Toulouse

    redirect
    oaioai:HAL:hal-03966086v1
    Last time updated on 14/02/2023

    Scientific Publications of the University of Toulouse II Le Mirail

    redirect
    oaioai:HAL:hal-03966086v1
    Last time updated on 12/02/2023