SAW sensor for detection of hydrocarbons. Numerical analysis and experimental results

Abstract

The paper presents the results of numerical analyses of the SAW gas sensor in the steady and non-steady state. The effect of SAW velocity changes vs. the surface electrical conductivity of the sensing layer is predicted. The conductivity of the porous sensing layer above the piezoelectric waveguide depends on the profile of the diffused gas molecule concentration inside the layer. Knudsen's model of gas diffusion was used. Numerical results for the gases CH4, C2H4, C3H8, C6H6 in the steady state and CH4 in the non-steady state in the WO3 sensing layer have been shown. The results of numerical analyzes allow to select the sensor design conditions, including the morphology of the sensor layer, its thickness and operating temperature. Some numerical results were verified in experimental studies concerning methane