Measurements of surface topography of microfinishing films with use of confocal laser scanning

Abstract

W pracy przedstawiono zagadnienia związane z pomiarami topografii powie- rzchni narzędzi ściernych stosowanych w procesach mikro- i nanoobróbki. Ocenie poddano zestaw elastycznych foliowych taśm mikrościernych z ziarnem diamentowym o nominalnym wymiarze od 0,5 Μm do 30 Μm. W bada- niach wykorzystano zaawansowany laserowy mikroskop pomiarowy LEXT OLS4000 firmy Olympus. Analiza uzyskanych danych pomiarowych prowadzona była w dostarczonym przez producenta dedykowanym oprogramowaniu LEXT 5.0. Uzyskane rezultaty badań potwierdziły dużą użyteczność i szerokie możliwości pomiarowe wykorzystywanego mikroskopu w badaniach topografii powierzchni tego typu narzędzi ściernych.In modern industry it is often required to improve the cleanliness and finish quality of surfaces of precise manufacturing parts. For this purpose, producers apply microfinishing [1], which permits to obtain the better quality than that obtained by different conventional finishing processes. This influences significantly the maintenance of proper operating parameters by manufactured parts. Microfinishing process is realized by means of various types of abrasive tools such as microfinishing films [2]. Manufacturers often make available incomplete or incorrect technical data concerning the stereometric characteristics of produced abrasive tools. This situation complicates the proper selection of the optimal machining parameters. In this case it is necessary to conduct investigations of the surface topography of the microfinishing film with use of precise measuring methods. This paper proves that such investigations can be carried out with use of advanced microscopy methods such as nonlocal laser scanning microscopy (CLSM) [4]. During experimental investigations a set of IDLF (ImperialŽ Diamond Lapping Film) films produced by 3M was assessed. IDLF combine diamond grains (nominal diameter from 0.5 Μm to 30 Μm), a resin bonding system and a uniform polyester film. The measurement of films were taken by a 3D measuring laser microscope LEXT OLS4000 produced by Olympus (Fig. 1.). Analysis of the obtained data was carried out in the dedicated LEXT 5.0. software provided by a system producer. The obtained results of investigations (Fig. 2.) confirmed the high usefulness and wide range of measurement of the used microscope in assessment of the surface topography of these types of abrasive tools