Study of a liquid metal field ion emitter for the production of Si ions

Abstract

The study of AuSi liquid metal alloy ion sources (LMAIs) for the production of Si ions is not new. However, the present work encompasses in a concise form almost all fundamental aspects of source behaviour, in particular of a Au 82Si18 source. A key finding, manifested in the behaviour of the ion extraction voltage with temperature, is the abnormal behaviour of the surface tension coefficient of the alloy with temperature. An important deduction, however, concerns the mechanisms responsible for the creation of doubly charged ions: reasons of self-consistency suggest that while Si ++ is directly field-evaporated, Au++ must form by the post-ionization of Au+. © 2004 Elsevier B.V. All rights reserved