Local vibrational mode (LVM) spectroscopy has been used to study the evolution of vacancy-oxygen-related defects (VOn) in the temperature range 300-700°C in carbon-lean Cz-Si samples irradiated with MeV electrons or neutrons. New experimental data confirming an attribution of the absorption bands at 910, 976 and 1105 cm-1 to the VO3 complex are obtained. In particular, a correlated generation Of VO3 and the oxygen trimer is observed upon irradiation of CzSi crystals in the temperature range 300-400°C. Strong evidence for the assignment of the bands at 991 and 1014 cm-1 to a VO4 defect is presented. The lines are found to develop very efficiently in the VO2 containing materials enriched with the oxygen dimer. In such materials the formation of VO 4 is enhanced due to occurrence of the reaction O 2i+VO2 ⇒ VO4. Annealing of the VO 3 and VO4 defects at T > 550C °C is found to result in the appearance of new defects giving rise to a number of O-related LVM bands in the range 990-1110 cm-1. These bands are suggested to arise from VO5 and/or VO6 defects. Similar bands also appear upon the annihilation of oxygen-related thermal double donors at 650°C in Cz-Si crystals pre-annealed at 450°C
