The effect of electrode geometry on the stability of a liquid metal ion emitter

Abstract

The effect on source stability of removing the extractor electrode from a liquid metal ion source system has been investigated. The noise of the current and the corresponding frequency spectra were carefully studied. The findings in the two cases, i.e. with and without an extractor electrode, were found to be very different. The explanation for this is given in terms of different droplet emission mechanisms being operative in the two cases. The liquid emitter used was a AuGeSi alloy. Focused Ge and Si ion beams are important for microelectronics applications. Thus, an understanding of the mechanisms that lead to source instability is essential. © 2003 Elsevier B.V. All rights reserved