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The mass spectrum of a tin liquid metal ion source
Authors
L. Bischoff Mair, G.L.R. Mair, A.W.R. Ganetsos, Th. Akhmadaliev, Ch.
Publication date
1 January 2004
Publisher
Abstract
Tin is an important metal with new potential applications regarding the fabrication of novel devices. In this work the mass spectrum of a tin liquid metal ion source (LMIS) is studied in detail. Sn++ was found to dominate in the beam both over Sn+ and over cluster ions. By studying the behaviour of the relative intensities of Sn+ and Sn ++, as a function of emission current, the conclusion is reached that both Sn+ and Sn++ are emitted as a result of direct field-evaporation from the liquid surface. Cluster ions form by ion impact-aided droplet disintegration. © 2004 Published by Elsevier B.V
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Last time updated on 10/02/2023