Preparation of SI{sub x}C{sub y}H{sub z} Films from Methylsilane by Plasma Enhanced Chemical Vapor Deposition

Authors
Publication date
1 March 1991
Publisher
eScholarship, University of California

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Sustaining member

    eScholarship - University of California

    redirect
    oaioai:escholarship.org:ark:/1303...
    Last time updated on 25/12/2021