B. Sillassen, M.

Chorkendorff, Ib

Damsgaard, Christian Danvad

Janik, Katarzyna Agnieszka

Seger, Brian

Wagner, Jakob Birkedal

Online Research Database In Technology

                       General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.  • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal   If you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim.     Downloaded from orbit.dtu.dk on: Dec 20, 2017Structure of thin film TiO2 grown by magnetron sputtering analyzed by ion, electron,and X-ray scatteringJanik, Katarzyna Agnieszka; Seger, Brian; B. Sillassen, M.; Damsgaard, Christian Danvad; Chorkendorff,Ib; Wagner, Jakob BirkedalPublication date:2014Document VersionEarly version, also known as pre-printLink back to DTU OrbitCitation (APA):Janik, K. A., Seger, B., B. Sillassen, M., Damsgaard, C. D., Chorkendorff, I., & Wagner, J. B. (2014). Structure ofthin film TiO2 grown by magnetron sputtering analyzed by ion, electron, and X-ray scattering. Abstract fromEuropean Powder Diffraction Conference 2014, Århus, Denmark.Structure of thin film TiO2 grown by magnetron sputtering analyzed by ion, electron, and X-ray scattering     K. A. Janik1, B. Seger 2, M. B. Sillassen3, C. D. Damsgaard 1,2, I. Chorkendorff 2, J. B. Wagner 1  1 Center for Electron Nanoscopy, Technical University of Denmark, 2800 Kongens Lyngby, Denmark  2 Department of Physics, Technical University of Denmark, 2800 Kongens Lyngby, Denmark 3 Interdisciplinary Nanoscience Center and the Department of Physics, Aarhus University, 8000 Aarhus, Denmark     Titanium dioxide (TiO2) receives a lot of attention in the context of hydrogen production by photocatalytic water splitting, where TiO2 can be used as a layer protecting silicon photocathodes. For this application, the TiO2 material is synthesized by the physical vapor deposition (PVD) in form of thin films. The overall structural quality of the TiO2 films, and thereby their properties, depends on the PVD processing conditions. Hence, our study focuses on getting a clear insight into films’ structure by comprehensive description of compositional, morphological, and crystallographic aspects of such deposits. A set of techniques that employ ion, electron and X-ray scattering is used for this purpose.                   This work presents an example of structural characterization of a TiOx deposit grown on Si <001> by reactive DC magnetron sputtering from a metal titanium (Ti) target in an Ar/O2 gas mixture. Rutherford backscattering spectrometry (RBS) indicates that the TiOx film is close to the stoichiometric compound, i.e. TiO2. X-ray diffraction performed in the symmetric (θ-2θ) and asymmetric (ω-2θ) scans shows that the film is polycrystalline and composed of two crystallographic phases, i.e. rutile and anatase. As revealed by scanning electron microscopy (SEM), the deposit is characterized by columnar grains. The crystallinity and morphology of the deposit is further studied by electron diffraction (ED) and transmission electron microscopy (TEM). TEM and ED measurements are performed on thin focused ion beam (FIB) milled lamellas prepared in the direction parallel and perpendicular to the direction of the TiO2 film growth.  Keywords: titanium dioxide, Rutherford backscattering, electron diffraction, X-ray diffraction, grazing incidence X-ray diffraction  

Structure of thin film TiO<sub>2</sub> grown by magnetron sputtering analyzed by ion, electron, and X-ray scattering

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Structure of thin film TiO<sub>2</sub> grown by magnetron sputtering analyzed by ion, electron, and X-ray scattering

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