The Microtechnology Center of Lawrence Livermore National Laboratory has developed a high performance hand-held, real time detection gas chromatograph (HHGC) by Micro-Electro-Mechanical-System (MEMS) technology. The total weight of this hand-held gas chromatograph is about five lbs., with a physical size of 8{close_quotes} x 5{close_quotes} x 3{close_quotes} including carrier gas and battery. It consumes about 12 watts of electrical power with a response time on the order of one to two minutes. This HHGC has an average effective theoretical plate of about 40k. Presently, its sensitivity is limited by its thermal sensitive detector at PPM. Like a conventional G.C., this HHGC consists mainly of three major components: (1) the sample injector, (2) the column, and (3) the detector with related electronics. The present HHGC injector is a modified version of the conventional injector. Its separation column is fabricated completely on silicon wafers by means of MEMS technology. This separation column has a circular cross section with a diameter of 100 pm. The detector developed for this hand-held GC is a thermal conductivity detector fabricated on a silicon nitride window by MEMS technology. A normal Wheatstone bridge is used. The signal is fed into a PC and displayed through LabView software

Yu, C.M.

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April 28, 1998This is a preprint of a paper intended for publication in a journal or proceedings.  Sincechanges may be made before publication, this preprint is made available with theunderstanding that it will not be cited or reproduced without the permission of theauthor.LawrenceLivermoreNationalLaboratoryUCRL-JC-130439PREPRINTThis paper was prepared for submittal to theInternational Mechanical Engineering Congress and Exposition '98Micro-Electro-Mechanical-System SymposiumAnaheim, CANovember 16-20, 1998A High Performance Hand-Held Gas ChromatographConrad M. YuDISCLAIMERThis document was prepared as an account of work sponsored by an agency ofthe United States Government.  Neither the United States Government nor theUniversity of California nor any of their employees, makes any warranty, expressor implied, or assumes any legal liability or responsibility for the accuracy,completeness, or usefulness of any information, apparatus, product, or processdisclosed, or represents that its use would not infringe privately owned rights.Reference herein to any specific commercial product, process, or service by tradename, trademark, manufacturer, or otherwise, does not necessarily constitute orimply its endorsement, recommendation, or favoring by the United StatesGovernment or the University of California.  The views and opinions of authorsexpressed herein do not necessarily state or reflect those of the United StatesGovernment or the University of California, and shall not be used for advertisingor product endorsement purposes.Lawrence Livermore LaboratoryUniversity of California/Livermore, CaliforniaA High Performance Hand - Held Gas ChromatographConrad M. YuApril 28, 1998AbstractThe  Microtechnology Center of Lawrence Livermore National Laboratory hasdeveloped a high performance hand-held, real time detection gaschromatograph (HHGC) by Micro-Electro-Mechanical-System (MEMS)technology.  The total weight of this hand-held gas chromatograph is aboutfive lbs., with a physical size of  8” x  5” x  3” including carrier gas and battery.It consumes about 12 watts of electrical power with a response time on theorder of one to two minutes. This HHGC has an average effective theoreticalplate of about 40k.  Presently, its sensitivity is limited by its thermal sensitivedetector at PPM.Like a conventional G.C., this HHGC consists mainly of three majorcomponents: 1) the sample injector, 2) the column, and 3) the detector withrelated electronics.  The present HHGC injector is a modified version of theconventional injector.  Its separation column is fabricated completely onsilicon wafers by means of MEMS technology.  This separation column has acircular cross section with a diameter of 100 µm.  The detector developed forthis hand-held GC is a thermal conductivity detector fabricated on a siliconnitride window by MEMS technology.  A normal Wheatstone bridge is used.The signal is fed into a PC and displayed through LabView software.2IntroductionGas chromatography (GC) has proven to be a reliable method for identifyingunknown chemical mixtures.  In a GC, an unknown chemical mixture is firstinjected and carried by a carrier gas into its separation column.  In theseparation column, the chemical mixture is distributed between two phases,one a mobile phase and the other the stationary phase.  The mobile phase istransported by a carrier gas in the separation column, and the stationary phaseis adsorbed into a solid from the flowing mobile phase.  Based upon thekinetics of the adsorption-desorption process in the gas-solid interface in thecolumn, different chemicals achieve different moving speeds in the carriergas.  Within a precise column length, the chemical mixture can be separatedinto various components and recorded by the detector.  For the conventionalGC, detector sensitivities are at about parts per million for thermal sensitivitydetectors and parts per billion for various ion cell detectors.  Chemicalcomponents are identified through their retention times – the traverse timefor each of them as they pass through the separation column.The separation efficiency of the G.C. column is related to the degree to whicha solute band broadens (which is a function of the width of the peak, w)relative to the length of time the band requires to traverse the column (itsretention time tR ).  The number of theoretical plates n is defined as 1 ,n = 16 (tR/w)2         ---- (1)Or, the number of effective theoretical plates is defined as,N = 5.56 [(tR - tM)/w1/2]2         ---- (2)where tM is the duration for nonabsorbed gases to traverse the separationcolumn and w1/2 the half linewidth of a signal peak. The efficiency of aseparation column is measured by the number of theoretical plates per unitlength or the “height equivalent to a theoretical plate” h (HETP),h = L/n ---- (3)Or, the “height equivalent to one effective theoretical plate” H (HEETP),H = L/N ---- (4)In the conventional GC, the separation column is usually formed by a glasscapillary with a diameter ranging from 150 to 300 microns and a length ofaround 100 meters.  The values of h or H are on the order of millimeters.  Toachieve this high column efficiency, the temperature of the separation3column needs to be uniform.  It must to be placed in a large, well- insulatedoven.  Because of this, conventional GCs are bulky, have high powerconsumption and are slow in response.The hand-held GC should have a wide appeal for numerous applications,such as toxic gas monitors, pollution detectors, reaction gas analysis, and lawenforcement usage.  To miniaturize a conventional G.C. we first need tominiaturize its separation column and oven assembly.The separation column and oven assembly can be greatly simplified whenmade from a highly thermal conductive material.  Silicon has higher thermalconductivity than glass, and its surface under ambient conditions willnaturally form silicon dioxide, an inert material which is ideal for formingthe inner liner of the separation column.  To form a highly efficientseparation column on a silicon wafer, the column must have (a) a circularcross section, (b) an extremely smooth inner surface and (c) proper diameterin term of its length.  The heater can then be made directly on the samesilicon wafers or on a separate one.Because of the small sample size, the thermal conductivity detector needs tobe extremely sensitive. The heat capacity of the heater and the total amount ofconductive heat loss other than that due to the carrier gas has to beminimized.  This device is small so it can allow for the direct interconnectingof the thermal detector into the gas stream. All this is done by MEMStechnology.Fabrication TechnologySeparation ColumnInitially, a mask must be designed for the separation column. Columnfabrication is limited to a 3” silicon wafer.  The total length of the spiralcolumn, is  limited. Therefore, to have a reasonably high resolution or largenumber of theoretical plates, the diameter of the column needs to be smalland precise.  The finished column diameter is 100 microns.  The length isabout 5.6 meter.  Since we are using an isotropic wet chemical etchingtechnique to form the final column, the initial width of the spiral on themask is 10 microns.  With alignment fiducial marks, two masks which aremirror-images are made.  In Fig. 1, the fabrication process schedule is listed.4Proc ess Sched ule  fo r Microc h an n e lBoron  Nitr id e orSilicon  Nitr id ePh oto resistBN or  SiN Dep ositionPho tolith ograp hyPlasma  Etch in gAce to neIsotr op icEtc hin gWet  Etc hin gFig. 1 Process for MicrochannelHere, the mask pattern is shown to be formed onto a silicon nitride coatedsilicon wafer through a photolithographic process.  A fine pattern is thenetched through the silicon nitride with plasma.  Afterwards, a semi-circulargroove is etched into the silicon wafer through an isotropic wet chemicaletching process.The isotropic etching process, Fig. 2, for silicon is the HF-HNO3-CH3COOHrecipe.5Fig 2 Semicircular ChannelHowever, silicon nitride can also be etched by this same etching process. Thisis due to the hydrofluoric acid (HF).  If the etching time is short, a  thicksilicon nitride coating may be used. In this etching system, the oxidizing agentnitric acid (HNO3) supplies both holes and hydroxyl groups to oxidize thesilicon with the trace impurity of nitrous acid (HNO2) in the solution4,5,6,7.       HNO2+HNO3+H2O      2HNO2+2OH-+2h+ (1)      4OH-+4h++Si                                       SiO2+2H2O             (2)The fluoride from the hydrofluoric acid (HF) will then combine with thesilicon dioxide (SiO2) to form the soluble solution H2SiF6.SiO2+6HF                                                  H2SiF6+2H2O             (3)Therefore, the overall net reaction is,      6HF+2HNO3+Si                                           H2SiF6+2HNO2+2H2O             (4)The overall net reaction can generate nitrous acid (HNO2), which promotes areaction (1).  Thus, the overall reaction is autocatalytic.  The role of the aceticacid (CH3COOH) is to dilute the etching reaction to be more controllable.After the two wafers are fabricated, they are ready for bonding.  Silicon fusionbonding, also known as silicon-to-silicon bonding, is the joining together oftwo silicon wafers without the use of intermediate adhesives such as6polymers or melting glasses, and without the use of applied electric fields asin anodic bonding 9 .  The bonding of two oxidized wafers at roomtemperature and subsequent annealing is the basic process, which allows thefabrication of buried oxide layers, and only standard silicon processingequipment is required.Wafer Alignment and BondingAccuracy in etching the alignment V- grooves is essential.  The groove width,location and alignment to the crystal plane is achieved duringphotolithography.  Two wafers with mirror images of etched semicircular,continuous spiral channels, are aligned by the V-grooves on the wafer surface.Precision fibers are inserted into the V-grooves.  The fibers are slightlyoversized to prevent contact of the wafer surfaces.  When the wafers arealigned, the wafer centers are pressed to make contact.  The fibers are thenremoved.  The bonded wafers are annealed to 11000 C for two hours.  Thebonded wafer pair is inspected under a UV lamp to detect internal voids(Fig 3, 3a).Fig. 3 Silicon Wafer Pair Fig. 3a Bonded Silicon Wafer PairColumn Coating and ConditioningAfter the column is formed, it is ready for coating.  The column needs to beclean from acid or base residues left in the column channel.  This is done bypumping through a large volume of deionized (16 Meg Ohm ) water.Afterwards, the column is inserted into the thermal oxide furnace (8000 C) forone hr. to deposit a thin layer of oxide on the capillary column surface.  Thecleaned column is now ready for coating.  A syringe filled with Dimethyl7silicone and chloroform solution is pumped through the column.  Thecolumn is conditioned at 2000 C with a flowing of N2 for .5 hr, then, 1000 C for.5 hr, then, 500 C  for four hours.Thermal Conductivity DetectorSilicon nitride has low heat conductance [ 3.2x10^(-2) W/cm*K] and it can bemade strong in a thin window structure.  By forming a nickel resistancepattern on a silicon nitride window, a very sensitive, miniature thermalconductivity detector is created.  Fig. 4 lists the standard process of forming asilicon nitride window and the process of forming a nickel resistance patternby standard liftoff process.Th erma l Cond uc tivity  Process Procedur esSilicon waferSilicon NitridePhotoresistPlasma EtchingAcetoneEnisotropic EtchingElectrodeFig. 4 Fabrication Process for the Thermal Conductivity Detector8AssemblyThe basic chromatograph consists of three main components; 1) the sampleinjector, 2) the capillary column, and 3) the detector and related electronics.Because of the short retention time in the separation column, a fast gassample injector is required.  This is achieved by modifying a conventionalinjector.  The injector is then interconnected with our innovative capillaryGC column, and our highly sensitive micromachined thermal conductivitydetector.  The signal is detected with a Wheatstone bridge and amplified andprocessed through an on-board 386 /33 MHz microcomputer. The signal isthen displayed on the screen through LabView software.Tests and ResultsWith a head pressure of Helium carrier gas at 6 psi, the temperature of thecolumn was set at 65 degrees Celsius.  A sample gas with about 10 parts permillion of C(1) to C(6) gases was injected.  A series of differential signals wasdisplayed on the screen as shown in Fig. 5.Fig. 5 ChromatogramThe traverse duration tm of a nonabsorbed gas was measured at about 8seconds. The average retention time of the group tr was about 45 seconds.The average half linewidth w1/2 is about 0.4 second.  Therefore, the number ofeffective theoretical plates can be calculated.  From equation (2),N = 5.56 [(tR - tM)/w1/2]2 = 4 *10^(4).By equation (4), we can calculate the “height equivalent to one effectivetheoretical plate” H (HEETP),H = L/N= 0.14.9DiscussionThe miniature silicon GC was initiated at Stanford University by S. C. Terry2,3.In this case, all three main components (injector, column, detector) wereintegrated on a bonded silicon–glass wafer pair.  LLNL decided to microfabricatethe three main components individually so that each can be optimized for highperformance, small size, and ease of manufacture. The smooth inner surfaceand circular cross-section of the separation column together with seamlessbonding between silicon wafers ensure precise uniform column coating.  It isthis uniform coating along with the high thermal conductivity of silicon whichdirectly decides the selectivity and the resolution of the column.  On the otherhand, the temperatures of the injector and the detector normally need to be sethigher to prevent condensation. These components need to be separated orthermally insulated from the separation column. System size reduction causesfaster analysis response time, but sample volume reduction effects thedetection sensitivity.  A highly sensitive thermal conductivity detector isdeveloped to compensate for the small sample size.  This detector allows forsensitivity at the PPM level.  In the near future, we intend to develop a samplepreconcentrator and more sensitive detectors to enhance the detectionsensitivity to the PPB region.This work was performed under the auspices of the U.S. Department ofEnergy by Lawrence Livermore National Laboratory under contract No.W-7405-Eng-48.AcknowledgmentThe author would like to thank Jackson C. Koo, Terri DeLima, Elaine Behymer,Matthew G. Lucas, Jeff D. Dopkus, Paul L. Stratton, and Barry Chiarello for theirsupport.References1. Walter Jennings , Gas Chromatography with Glass Capillary ColumnDepartment of Food Science and Technology University of CaliforniaDavis, California.2. S. C. Terry, “A gas chromatography system fabricated on a silicon wafer using integrated circuit technology,” Ph. D. dissertation,Department of Electrical Engineering, Stanford University, StanfordCalifornia, 19753. S. C. Terry, J.H. Jerman, and J. B. Angell, “A gas chromatograph air analyzer fabricated on a silicon wafer,” IEEE Trans. Electron Devices,vol. ED-26, p. 1880, 1979.104. H. Robbins and B. Schwartz, “Chemical etching of silicon, II. The system HF, HNO3 , HC2 H3 O2 ,“ J. Electrochem. Soc., vol. 106, p. 505, 1959.5. B. Schwartz and H. Robbins, “Chemical etching of silicon, IV.Etching technology,” J. Electrochem.  Soc., vol. 123, p. 1903, 1976.6. H. Huraoka, T. Ohhashi, and Y. Sumitomo, “Controlled preferentialetching technology,” in Semiconductor Silicon 1973, H. R. Huff andR. R. Burgess, Eds. (The Electrochemical Society Softbound Symposium Ser., Princeton, N. J.), 1973, p. 327.7. W. Kern, “Chemical etching of silicon, germanium, gallium arsenide, and gallium phosphide,” RCA Rev., vol. 29, p. 278.8. A. Manz, et al. (Hitachi, Japan), “Design of an open-tubular column liquid chromatography using silicon chip technology,” Sensors and Actuators, B1 (1990), pp. 249-2559. R. Reston and E. Kolesar, “Silicon-micromachined gas chromatographysystem used to separate and detect ammonia and nitrogen dioxide,” J. of Microelectromechanical Systems, vol. 3, No. 4, (1994), pp. 134-146.10. Dino R. Ciarlo, “High-and Low-Temperature Bounding Techniquesfrom Microstructures,” Proceedings of the second international symposium on Semiconductor Wafer Bonding; Science, Technology, and Applications, pp. 314-315.Technical Information Department  • Lawrence Livermore National LaboratoryUniversity of California • Livermore, California  94551

High performance hand-held gas chromatograph

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High performance hand-held gas chromatograph

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