High-Q Lithium Niobate Microring-Resonators On Silicon

Authors
Publication date
1 January 2013
Publisher
'Information Bulletin on Variable Stars (IBVS)'

Abstract

Submicron lithium niobate waveguides and resonators are demonstrated on silicon by a novel and reliable ion implantation and wafer bonding technique. Waveguide ridges are formed by selective oxidation of tantalum to avoid etching lithium niobate. © 2013 The Optical Society

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