Ferroelectric properties of chemical-solution-deposited Ba0.85Ca0.15Ti0.90Zr0.10O3 (BCZT) thin films in the 200 nm thickness range, grown in air and oxygen-rich atmospheres, were investigated. Oxygen-processed BCZT thin films were found to have very slim hysteresis with higher polarization, lower remanent polarization (P-r), much lower coercivity and much higher dielectric breakdown strength. Those properties resulted in superior energy storage properties. Oxygen-processed BCZT thin films showed an energy storage density (ESD) of 64.8 J cm(-3) and energy storage efficiency (ESF) of 73% at 2000 kV cm(-1) electric field. Apart from that, the films showed very low leakage current and improved polarization fatigue properties. Oxygen-processed virgin BCZT film displayed maximum polarization (P-max) of 106 mu C cm(-2) and P-r of 12.9 mu C cm(-2), whereas the measured P-max and P-r of the fatigued film after 10(10) switching cycles were 105 mu C cm(-2) and 13.2 mu C cm(-2) respectively. BCZT thin films with high ESD and ESF at 2000 kV cm(-1) electric field and with excellent fatigue properties could be considered as potential candidates for low and intermediate voltage ferroelectric energy storage applications
