This study aims to determine the effect of annealing process on the structure and hardness of Diamond Like Carbon (DLC) layer resulting from Plasma Chemical Vapour Deposition (PCVD) process on AISI 410 stainless steel material. The annealing process was carried out on AISI 410 stainless steel material at temperature 850°C with holding time 20 minutes and cooled to room temperature. Furthemore, the process of forming DLC layer was carried out using PCVD method using argon gas and LPG with flow rate ratio 9:1 at pressure 1,6 mbar, temperature 400°C, and coating time 4 hours. The results of Raman Spectroscopy test showed that DLC layer structure on AISI 410 stainless steel which was not annealed had more sp3 (diamond) content than DLC layer on AISI 410 stainless steel which was annealed. The results of Vickers microhardness test showed that DLC layer on AISI 410 stainless steel which was not annealed had a greater hardness value of 914,14 VHN compared to DLC layer on AISI 410 stainless steel which was annealed which was 612,30 VHN
