There is an increasing demand for sensors to monitor environmental levels of ultraviolet (UV) radiation and pollutant gases. In this work, an individual nanowire of Pd modified ZnO nanowire (ZnO:Pd NW) was integrated in a nanosensor device for efficient and fast detection of UV light and CH4 gas at room temperature. Crystalline ZnO:Pd nanowire/nanorod arrays were synthesized onto fluorine doped tin oxide (FTO) substrates by electrochemical deposition (ECD) at relative low-temperatures (90 °C) with different concentrations of PdCl2 in electrolyte solution and investigated by SEM and EDX. Nanodevices were fabricated using dual beam focused electron/ion beam (FIB/SEM) system and showed improved UV radiation response compared to pristine ZnO NW, reported previously by our group. The UV response was increased by one order in magnitude (∼ 11) for ZnO:Pd NW. Gas sensing measurements demonstrated a higher gas response and rapidity to methane (CH4 gas, 100 ppm) at room temperature, showing promising results for multifunctional applications. Also, due to miniature size and ultra-low power consumption of these sensors, it is possible to integrate them into portable devices easily, such as smartphones, digital clock, flame detection, missile lunching and other smart devices
