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Mems Clocking-Cantilever Thermal Detector
Authors
Javaneh Boroumand
Pedro Figueiredo
+3 more
Janardan Nath
Imen Rezadad
Evan Smith
Publication date
17 September 2013
Publisher
'Information Bulletin on Variable Stars (IBVS)'
Abstract
We present performance calculations for a MEMS cantilever device for sensing heat input from convection or radiation. The cantilever deflects upwards under an electrostatic repulsive force from an applied periodic saw-tooth bias voltage, and returns to a null position as the bias decreases. Heat absorbed during the cycle causes the cantilever to deflect downwards, thus decreasing the time to return to the null position. In these calculations, the total deflection with respect to absorbed heat is determined and is described as a function of time. We present estimates of responsivity and noise. © 2013 SPIE
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Last time updated on 18/10/2022