Large Bandwidth Silicon Nitride Spot-Size Converter For Efficient Supercontinuum Coupling To Chalcogenide Waveguide

Abstract

Silicon nitride spot-size converters were fabricated in a damascene process to improve the performance of supercontinuum generation in arsenic-free chalcogenide waveguides. Supercontinuum generation covering 950-1750 nm with 200 pJ pulses is demonstrated

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