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Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
Authors
T. Ishikawa
N. Kidani
+8 more
J. Kim
Y. Kohmura
S. Matsuyama
H. Mimura
Y. Sano
K. Tamasaku
M. Yabashi
K. Yamauchi
Publication date
Publisher
'SPIE-Intl Soc Optical Eng'
Doi
Cite
Abstract
We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results. © 2011 SPIE.S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987.SPIE Optical Engineering + Applications, 2011, San Diego, California, United State
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Last time updated on 30/10/2022