Free-space micro-optical intra-MCM interconnection modules: performances, potentialities and limitations

Abstract

We design and realize a scalable multi-channel free-space interconnection prototype with the potential for Tb/s.cm(2) aggregate bit rate capacity over inter- and intra- MCM interconnection distances. The component is prototyped in a high quality optical plastic, PMMA, using deep lithography with protons. At present data communication is achieved at 622 Mb/s per channel with a BER smaller than 10 (-13) for the 16 channels with inter-channel cross-talks as low as -22dB. We perform a sensitivity analysis for misalignments and study the impact of fabrication errors on the performance of the interconnection module in case injection moulding would be the preferred mass-fabrication technique. We provide evidence that these modules can be mass-fabricated with the required precision in optical plastics suited for heterogeneous integration with semiconductor materials