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Patterning And Hardening Of Gold Black Infrared Absorber By Shadow Mask Deposition With Ethyl Cyanoacrylate
Authors
Javaneh Boroumand
Doug Maukonen
+3 more
Nima Nader-Esfahani
Deep Panjwani
Imen Rezadad
Publication date
7 August 2013
Publisher
'Information Bulletin on Variable Stars (IBVS)'
Abstract
Patterning of gold-black infrared absorbing films by stencil lithography and hardening by polymer infusion is reported. Gold black nano-structured films are deposited through a thin metal shadow mask in a thermal evaporator in ~400 mTorr pressure of inert gas, followed by ethyl cyanoacrylate fuming through the same mask to produce rugged IR absorptive patterns of ~100 micron scale dimensions. Infrared absorptivity is determined by transmission and reflectivity measurements using a Fourier spectrometer and infrared microscope. Results indicate that the optimized hardening process reduces the usual degradation of the absorptivity with age. This work has potential application to infrared array bolometers. © 2013 SPIE
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Last time updated on 18/10/2022