'Institute of Electrical and Electronics Engineers (IEEE)'
Doi
Abstract
International audienceLa0.7Sr0.3Mn03 (LSMO) suspended bolometers of various geometries have been fabricated using silicon micromachining techniques. Thanks to adequate geometry design and to the operating conditions (temperature and bias current), these uncooled bolometers could be limited by phonon noise and achieve NEP values below 1 pW Hz-1/2 around 300 K
