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Piezoelectric thin films on silicon for sensor application
Authors
Héloïse Colder
Alice Galdi
+3 more
Corentin Jorel
Laurence Méchin
Didier Robbes
Publication date
20 May 2013
Publisher
HAL CCSD
Abstract
PosterInternational audienc
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HAL - Normandie Université
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oai:HAL:hal-00979511v1
Last time updated on 20/05/2019
